Sputtering Device

Sputtering is a dry plating method that does not expose the objects to be coated to liquid or heated gas. With applications in a variety of fields, it is an essential technology for the high quality membrane deposition required for semiconductors and FPD.

CVD Equipment

CVD, or chemical vapor deposition, is one technique for making thin films. Gas containing components needed for different membranes are exposed to heated substrates, resulting in the deposition of a membrane by chemical reaction on the substrate surface.

Vacuum Robots

In a clean environment, these are used to safely and accurately transport semiconductor wafers and FPD panels.

Ion Implantation Equipment

Ion implantation is accelerating ionized atoms or molecules, and implanting them into a substrate to alter its properties. In semiconductor manufacturing, it is possible to provide electrical characteristics by implanting boron or phosphorus into silicon wafers.

Etching Equipment

Etching is a surface processing method that uses the corrosive effect of a chemical solution or reactive gas. In semiconductor manufacturing it is used as a method to remove thin films in the patterning process of wafers. There is dry etching, which uses gas turned into plasma to accelerate ions to scrape away film by scientific reaction, and wet etching, which utilizes the corrosive effects of acid and alkali.

Epitaxial Growth System

Epitaxial growth is the deposition of a uniform orientation crystalline overlayer on a crystalline substrate base. For next generation SiC and GaN power electronic substrates manufacturing, epitaxial growth is a vital technology.

Gas Introduction Machines

It’s possible to introduce gas into a processing cell chamber by taking advantage of the sealing capabilities of the vacuum seal. We also have a track record of the multi-channel type.

Vacuum Chuck

By using the vacuum’s suction force, this is a method of fixing wafers and glass substrate by adsorption. Fixation allows samples not to be damaged by high-speed rotation or transport.