Patterning 

Replacement demand for our materials such as quartz, ceramics, silicon parts,
and silicon carbide is growing in proportion to the increase in production by semiconductor customers.
We offer a variety of semiconductor-related products, including a thermoelectric cooler module, which has recently been adopted as a cooling plate of manufacturing equipment for controlling the wafer temperature.

1
Silicon base

1. Silicon Ingot Cutting

[Products used in this process]
Silicon Wafers

2
Silicon base

2. Silicon Wafer

[Products used in this process]
Silicon Wafers

3
Silicon base

3. Oxidation and Diffusion

[Products used in this process]
Vacuum Seals
Quartz Products
Ceramics
SiC Parts (CVD-SiC)
Silicon carbide parts

4
Transistor Layer

4. Lithography


[Products used in this process]
Vacuum Seals
Ceramics
SiC Parts (CVD-SiC)
Silicon Wafers
Process Parts Cleaning
Thermo-electric Modules
CMS

5
Transistor Layer

5. Lithography


[Products used in this process]
Vacuum Seals
Ceramics
SiC Parts (CVD-SiC)
Silicon Wafers
Process Parts Cleaning
Thermo-electric Modules
CMS

6
Transistor Layer

6. Lithography


[Products used in this process]
Vacuum Seals
Ceramics
SiC Parts (CVD-SiC)
Silicon Wafers
Process Parts Cleaning
Thermo-electric Modules
CMS

7
Transistor Layer

7. Etching


[Products used in this process]
Vacuum Seals
Quartz
Ceramics
SiC Parts (CVD-SiC)
Silicon carbide parts
Silicon parts
Process Parts Cleaning
CMS

8
Transistor Layer

8. Cleaning


[Products used in this process]
Vacuum Seals
Quartz
Ceramics
SiC Parts (CVD-SiC)
Silicon carbide parts
Silicon parts
Process Parts Cleaning
CMS

9
Transistor Layer

9. CVD


[Products used in this process]
Vacuum Seals
Quartz
Ceramics
SiC Parts (CVD-SiC)
Silicon carbide parts
Silicon parts
Process Parts Cleaning
CMS

10
Transistor Layer

10. CMP

[Products used in this process]
Vacuum Seals
Quartz
Ceramics
Silicon parts
Process Parts Cleaning
CMS

11
Transistor Layer

11. Lithography


[Products used in this process]
Vacuum Seals
Ceramics
SiC Parts (CVD-SiC)
Silicon parts
Process Parts Cleaning
Thermo-electric Modules
CMS

12
Transistor Layer

12. Lithography


[Products used in this process]
Vacuum Seals
Ceramics
SiC Parts (CVD-SiC)
Silicon parts
Process Parts Cleaning
Thermo-electric Modules
CMS

13
Transistor Layer

13. Lithography


[Products used in this process]
Vacuum Seals
Ceramics
SiC Parts (CVD-SiC)
Silicon parts
Process Parts Cleaning
Thermo-electric Modules
CMS

14
Transistor Layer

14. Etching


[Products used in this process]
Vacuum Seals
Quartz
Ceramics
SiC Parts (CVD-SiC)
Silicon carbide parts
Silicon parts
Process Parts Cleaning
CMS

15
Transistor Layer

15. Ion implantation


[Products used in this process]
Quartz
Silicon parts
Process Parts Cleaning
CMS

16
Transistor Layer

16. CVD


[Products used in this process]
Vacuum Seals
Quartz
Ceramics
SiC Parts (CVD-SiC)
Silicon carbide parts
Silicon parts
Process Parts Cleaning
CMS

17
Wiring

17. Lithography


[Products used in this process]
Vacuum Seals
Ceramics
SiC Parts (CVD-SiC)
Silicon parts
Process Parts Cleaning
Thermo-electric Modules
CMS

18
Wiring

18. CVD


[Products used in this process]
Vacuum Seals
Quartz
Ceramics
SiC Parts (CVD-SiC)
Silicon carbide parts
Silicon parts
Process Parts Cleaning
CMS

19
Wiring

19. Wiring


[Products used in this process]
Vacuum Seals
Quartz
Ceramics
SiC Parts (CVD-SiC)
Silicon parts
Process Parts Cleaning
CMS

20
Wiring

20. Wiring


[Products used in this process]
Vacuum Seals
Quartz
Ceramics
SiC Parts (CVD-SiC)
Silicon parts
Process Parts Cleaning
CMS

21
Assembly / Inspection

21. Assembly
Cut the wafer into chips
Seal with ceramic resin


[Products used in this process]

22
Assembly / Inspection

22. Inspection
Check functionality,
environmental characteristics,
reliability, etc


[Products used in this process]
Ceramics

23
Assembly / Inspection

23. Completion
Print serial number
and it’s ready



[Products used in this process]

▶︎End products

DRAM
Logic
3D NAND
line
glass
frame
DRAM
Logic
3D NAND
Battery
Case
Text
Mobile handset, tablet, datacenter

Manufacturing equipment examples

Array

ArrayLithography

Coater/developer
(resist coating)
Exposure equipment
(exposure and development using photomask)
Etching

EtchingEtching

Dry etching equipment
(plasma etching)
Cleaning

CleaningCleaning

Wet etching equipment
(liquid etching)
CVD

CVDCVD

CVD equipment
(insulating film forming)
CMP

CMPCMP

(polishing / planarization)
Ion implantation

Ion implantationIon implantation

(Formation of Element)
Wiring

WiringWiring

CVD equipment + Dry etching equipment
+ Sputtering equipment+ Plating equipment
+ CMP equipment
Semiconductor
manufacturing process▶︎
Silicon base Array Array Array Array Array Array Array Assembly
・Inspection
Lithography Etching Process Tools Parts Cleaning CVD CMP Ion implantation Wiring
Transistor layer 〜 Wiring / Multilayer wiring
▼ Products of Ferrotec used in each process
Vacuum Seals
  •  
  •  
Quartz
  •  
  •  
  •  
Ceramics
  •  
SiC Parts (CVD-SiC)
  •  
  •  
  •  
Silicon carbide parts
  •  
  •  
  •  
  •  
  •  
Silicon parts
  •  
Process Tool Parts Cleaning
  •  
  •  
Thermo-electric Modules
  •  
  •  
  •  
  •  
  •  
  •  
  •  
  •  
CMS
  •  
  •  


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