Region

Ferrotec Global

The Equipment Related Business
Electronic Device Business
Photovoltaic Related Products
Photovoltaic Silicon
Other Related Business

The Equipment Related Business

Process Tools Parts
Cleaning

We perform cleaning for semiconductors and FPD production equipment parts (TFT/ OLED).
In addition to pure water cleaning, we are also equipped with sand blasters and plasma spraying apparatus.
To meet the needs of our customers, we have the latest miniaturization equipment that supports 28nm.

Organisational Structure of the Parts Micro Cleaning Business

FerroTec Anhui FTSVA

Anhui　Ferrotec (Anhui) Technology Development Co., Ltd.

Founded
2018/12
Semi
Display
30%
70%
Total area
24000㎡
Total clean room
2000㎡
Size capability
Semi size
(PVD/CVD/DIFF/Etch/Photo-L)
Display size
L 4000mm
×W 800mm
×D 500mm
10.5G
Staff
325
Special process
Precision Cleaning / Anodic oxidation / plasma spraying / arsenic treatment / water jet cleaing
Enhance quatz cleanning / Bead Blasting / Al/Ti Arc Spray
Adress
No.18 Nanhai Road, Yian Economic Development Zone, YiAn, Tongling City, 244100, P.R. China

Map

FerroTec Dalian FTSVD

Dalian　Ferrotec (Dalian) Technology Co., Ltd.

Founded
2017/3
Semi
Display
100%
0%
Total area
6400㎡
Total clean room
360㎡
Size capability
Semi size
(PVD/CVD/DIFF/Etch/Photo-L)
Display size
L 1500mm
×W 800mm
×D 500mm
---
Staff
99
Special process
Precision Cleaning / Enhance quatz cleanning / Bead Blasting / Al/Ti Arc Spray
Adress
No.179-8 HaiMing Road, Bonded Area of Economic Development Zone, Dalian City,116102 P.R. China

Map

FerroTec Tianjin FTSVT

Tianjin　Ferrotec (Tianjin) Technology Co., Ltd.

Founded
2011/9
Semi
Display
50%
50%
Total area
4000㎡
Semi：1500㎡
Display：2500㎡
Total clean room
400㎡
Semi：200㎡
Display：200㎡
Size capability
Semi size
(PVD/Etch/CVD)
Display size

L 1500mm
×W 800mm
×D 500mm
8.5G
L 3200mm
×W 800mm
×D 1000mm
Staff
99
Special process
Precision Cleaning / Bead Blasting / Al Arc Spray
Adress
2# Jingbang Industrial Park, WuQing District, Tianjin City, 301712, P.R. China

Map

FerroTec Sichuan FTSVS

Sichuan　Ferrotec (Sichuan) Technology Co., Ltd.

The first factory
Founded
2016/1
Semi
Display
0%
100%
Total area
5000㎡
Total clean room
550㎡
Size capability
Semi size
Display (LCD) size
---
8.5G
L 3200mm
×W 800mm
×D 1000mm
Staff
128
Special process
Precision Cleaning / Bead Blasting / Al Arc Spray
Adress
No.888 HanChen Road, Neijiang Economic Development Zone, Neijiang City, 641099, P.R. China

Map
    The second factory
Founded
2018/3
Semi
Display
20%
80%
Total area
16000㎡
Total clean room
900㎡
Semi：300㎡
Display：600㎡
Size capability
Semi size
(PVD/Etch/CVD)
Display(OLED) size

L 1500mm
×W 800mm
×D 500mm
6G
L 3200mm
×W 1200mm
×D 8500mm
Staff
84
Special process
Precision Cleaning / Bead Blasting / Al Arc Spray
Adress
No.888 HanChen Road, Neijiang Economic Development Zone, Neijiang City, 641099, P.R. China

Map

FerroTec Shanghai FTSVC

Shanghai　Ferrotec (Shanghai) Technology Co., Ltd.

Founded
2019/6
Semi
Display
100%
0%
Total area
1500㎡
Total clean room
200㎡
Size capability
Semi size
(ETCH)
Display Size
L 800mm
×W 800mm
×D 400mm
---
Staff
40
Special process
Precision Cleaning / Bead Blasting / Al Arc Spray
Adress
BLDG.10, No181 ShanLian Road, BaoShan Vrban Industrial Garden, Shanghai, 200444, P.R. China

Map
Manufacturing sites of this product

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