The Equipment Related Business

Process Tools Parts
Cleaning

We perform cleaning for semiconductors and FPD production equipment parts (TFT/ OLED).
In addition to pure water cleaning, we are also equipped with sand blasters and plasma spraying apparatus.
To meet the needs of our customers, we have the latest miniaturization equipment that supports 28nm.

Organisational Structure of the Parts Micro Cleaning Business

FerroTec Anhui FTSA

Anhui Ferrotec(Anhui)Technology Co., Ltd.

Founded
2018/12
Semi
Display
30%
70%
Total area
24000㎡
Total clean room
2000㎡
Size capability
Semi size
(PVD/CVD/DIFF/Etch/Photo-L)
Display size
L 4000mm
×W 800mm
×D 500mm
10.5G
Staff
325
Special process
Precision Cleaning / Anodic oxidation / plasma spraying / arsenic treatment / water jet cleaing
Enhance quatz cleanning / Bead Blasting / Al/Ti Arc Spray
Adress
Jinling Economic Dvlpt Zone, Tongling County, Anhui, P.R. China

Map

FerroTec Dalian FTST

Dalian Ferrotec (Dalian) Technology Co.,Ltd.

Founded
2017/3
Semi
Display
100%
0%
Total area
6400㎡
Total clean room
360㎡
Size capability
Semi size
(PVD/CVD/DIFF/Etch/Photo-L)
Display size
L 1500mm
×W 800mm
×D 500mm
---
Staff
99
Special process
Precision Cleaning / Enhance quatz cleanning / Bead Blasting / Al/Ti Arc Spray
Adress
179-8, Haiming Rd, Bldg. B4 GLPI-Park, Dalian Free Trade Zone, Dalian, Liaoning, China

Map

FerroTec Tianjin FTST

Tianjin Ferrotec (Tianjin) Technology Co.,Ltd

Founded
2011/9
Semi
Display
50%
50%
Total area
4000㎡
Semi:1500㎡
Display:2500㎡
Total clean room
400㎡
Semi:200㎡
Display:200㎡
Size capability
Semi size
(PVD/Etch/CVD)
Display size

L 1500mm
×W 800mm
×D 500mm
8.5G
L 3200mm
×W 800mm
×D 1000mm
Staff
99
Special process
Precision Cleaning / Bead Blasting / Al Arc Spray
Adress
#2 Jingjun xiyuan Jingbin Industrial Park Wuqing District, Tianjin P.R. China

Map

FerroTec Sichuan FTSS

Sichuan Ferrotec (Sichuan) Technology Co.,Ltd

The first factory
Founded
2016/1
Semi
Display
0%
100%
Total area
5000㎡
Total clean room
550㎡
Size capability
Semi size
Display (LCD) size
---
8.5G
L 3200mm
×W 800mm
×D 1000mm
Staff
128
Special process
Precision Cleaning / Bead Blasting / Al Arc Spray
Adress
The Northern Section of Sichuan Province AnTai Neijiang Economic and Technological Development Zone Street # 888, China

Map
    The second factory
Founded
2018/3
Semi
Display
20%
80%
Total area
16000㎡
Total clean room
900㎡
Semi:300㎡
Display:600㎡
Size capability
Semi size
(PVD/Etch/CVD)
Display(OLED) size

L 1500mm
×W 800mm
'×D 500mm
6G
L 3200mm
×W 1200mm
×D 8500mm
Staff
84
Special process
Precision Cleaning / Bead Blasting / Al Arc Spray
Adress
The Northern Section of Sichuan Province AnTai Neijiang Economic and Technological Development Zone Street # 888, China

Map

FerroTec Shanghai FTSC

Shanghai Shanghai shenhe thermo-magnetics electronics Co.,Ltd.

Founded
2019/6
Semi
Display
100%
0%
Total area
1500㎡
Total clean room
200㎡
Size capability
Semi size
(ETCH)
Display Size
L 800mm
×W 800mm
×D 400mm
---
Staff
40
Special process
Precision Cleaning / Bead Blasting / Al Arc Spray
Adress
181 Shanlian Road,Shanhai Baoshan City Industrial Zone 200444,P.R.China

Map
Manufacturing sites of this product


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